Major Semiconductor Manufacturer
Clean Rooms, Projects
Highlights:
- Fine controllability of temperature and humidity
- Custom adiabatic high pressure DI RO water humidifiers with staged controllability
- Stainless steel liners
- Multiple stages of filtration
- All materials tested for off-gassing
- 4” heavy duty casing for high pressure airstream
- Internal isolation of fans for minimized vibration transmission
- Large access sections and doors between all components for maintenance and cleaning
- Factory piping to meet customer’s stringent standards
- Single point power for 3 phase loads
- Internal lighting
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